Description

Recently fabrication of Very Large Scale Integrated circuits has spun-off a new technology of micro-machines (MEMS) and sensors on a semiconductor wafer. These new devices are ideally located next to a microprocessor on the same wafer or a separate chip. The data transfer to and from a miniature machine, sensor or transducer is processed and controlled on site. Topics include design of mechanical, electrical and biological transducers; properties of electronic materials; pattern generation on a semiconductor wafer; interface of a micromachine and processor; applications and markets for submicron machines.